Core research topics

The group has a range of various activities in the field of micro and nano technology and related materials. Micro and nano electro- mechanical systems (MEMS/NEMS) have completely changed human society in the past decades. Many devices that are taken for granted these days like smart phones and modern car would be unthinkable without them. Our motivation for the research we are doing is to provide means to improve safety and comfort in a sustainable way. We target to work closely with partners from industry.  

Research Activities

Research Group: Advanced

Materials Development for

Micro/Nano Devices and Systems

© Tohoku University

Micro acoustic actuator

Currently availbale micro acoustic actuators have several limitations in regards to sound quality, energy effiency and complexity. By appling MEMS technolgy with electromagnetic and electrostatic actuation we aim to develop devices to overcome those shortcomings.


Application of amorphous metal for high

performance MEMS

The aim of this work is the development of technologies for deposition, structuring and characterization of amorphous metallic alloys, especially metallic glasses for application in MEMS devices.

Solid Liquid Interdiffusion Bonding near

room temperature

There is a large demand for assembly technologies that are usable at temperatures near to room temperature. By using such technologies it is possible to create heterogenous systems with high reliability.