Masayoshi Esashi Principal Investigator, Ph.D.

Job Professor of Advanced Institute for Materials Research (AIMR)
Director of Micro System Integration Center (µSIC)
Group Device/System Group
Laboratory M.Esashi Laboratory
Address 519-1176, Aza Aoba, Aramaki Aoba-ku Sendai, 980-0845
(Junichi Nishizawa Memorial Research Center)
Tel +81-22-305-2351
Fax +81-22-305-2352
Related Site

Research Interests

  • Materials for MEMS (Micro Electro Mechanical Systems)
  • Wafer Level Heterogeneous Integration

Main Publication List

  • Electrostatically Levitated Ring-Shaped Rotational-Gyro /Accelerometer, Jpn. J. Appli. Phys., 42, Part1 No.4B (2003) pp.2468-2472, T.Murakoshi, Y.Endo, K.Sigeru, S.Nakamura and M.Esashi
  • Wafer Level Packaging of MEMS, J. of Micromechanics and Microengineering, 18 (2008) 073001(13pp), M.Esashi
  • Micromirror with Large-tilting Angle Using Fe-based Metallic Glass, Optics Letters, 36, 17 (2011) 3464-3466, J.-W.Lee, Y.-C.Lin, N.Kaushik, P.Sharma, A.Makino, A.Inoue, M.Esashi and T.Gessner
  • Active-matrix Nanocrystalline Si Electron Emitter Array for Massively Parallel Direct-write Electron-beam System: First Results of the Performance Evaluation, J. Micro/Nanolith. MEMS MOEMS 11, 031406 (2012), DOI:10.1117/1.JMM.11.3.031406, N.Ikegami, T.Yoshida, A.Kojima, H.Ohyi, N.Koshida and M.Esashi
  • Lithium-Niobate-Based Surface Acoustic Wave Oscillator Directly Integrated with CMOS Sustaining Amplifier, IEEE Trans. on Ultrasonics, Ferroelectrics and Frequency Control, 59, 8 (2012) 1800-1805, S.Tanaka, K.D.Park and M.Esashi


  • IECEJ Achievement Award (1990)
  • Japan IBM Science Award (1993)
  • SSDM Award (2001)
  • The 27th JJAP Best Paper Award (2005)
  • Purple Ribbon Award (2006)